Full-range dynamic positioning of parallel-plate electrostatic actuators

L Mol; LA Rocha; E Cretu; RF Wolffenbuttel

Full-range dynamic positioning of parallel-plate electrostatic actuators

L Mol, LA Rocha, E Cretu, RF Wolffenbuttel

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 16th MME MicroMechanics Europe Workshop
Editors	s.n.
Place of Publication	s.l.
Publisher	s.n.
Pages	280-283
Number of pages	4
ISBN (Print)	91-631-7553-3
Publication status	Published - 2005
Event	16th Workshop on Micromachining, Micromechanics and Microsystems ( MME), Göteborg, Sweden - s.l. Duration: 4 Sept 2005 → 6 Sept 2005

Publication series

Name
Publisher	s.n.

Conference

Conference	16th Workshop on Micromachining, Micromechanics and Microsystems ( MME), Göteborg, Sweden
Period	4/09/05 → 6/09/05

Bibliographical note

Editor onbekend JH

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{42ff4a1a4e8144c19067834c06d207bf,

title = "Full-range dynamic positioning of parallel-plate electrostatic actuators",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "L Mol and LA Rocha and E Cretu and RF Wolffenbuttel",

note = "Editor onbekend JH; 16th Workshop on Micromachining, Micromechanics and Microsystems ( MME), G{\"o}teborg, Sweden ; Conference date: 04-09-2005 Through 06-09-2005",

year = "2005",

language = "Undefined/Unknown",

isbn = "91-631-7553-3",

publisher = "s.n.",

pages = "280--283",

editor = "s.n.",

booktitle = "Proceedings of the 16th MME MicroMechanics Europe Workshop",

}

TY - GEN

T1 - Full-range dynamic positioning of parallel-plate electrostatic actuators

AU - Mol, L

AU - Rocha, LA

AU - Cretu, E

AU - Wolffenbuttel, RF

N1 - Editor onbekend JH

PY - 2005

Y1 - 2005

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 91-631-7553-3

SP - 280

EP - 283

BT - Proceedings of the 16th MME MicroMechanics Europe Workshop

A2 - s.n., null

PB - s.n.

CY - s.l.

T2 - 16th Workshop on Micromachining, Micromechanics and Microsystems ( MME), Göteborg, Sweden

Y2 - 4 September 2005 through 6 September 2005

ER -