| Original language | English |
|---|---|
| IPC | C30B; H01L; C03B; C01B |
| Priority date | 18/12/17 |
| Publication status | Published - 2019 |
Bibliographical note
Patent: OCT-17-096Applicant: TU Delft
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Sten Vollebregt (Inventor), Filiberto Ricciardella (Inventor), Lina Sarro (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| IPC | C30B; H01L; C03B; C01B |
| Priority date | 18/12/17 |
| Publication status | Published - 2019 |