Fully integrated MEMS TGA device for inspection of nano-masses

E Iervolino

    Research output: Thesis › Dissertation (TU Delft)

    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    • Delft University of Technology
    Supervisors/Advisors
    • Sarro, P.M., Supervisor
    Award date2 May 2012
    Print ISBNs9789462030312
    Publication statusPublished - 2012

    Keywords

    • Diss. prom. aan TU Delft

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