Functional materials for MEMS based gas sensors

M. Ramachandrappa Venkatesh

Research output: ThesisDissertation (TU Delft)

114 Downloads (Pure)

Abstract

A MEMS gas sensor consists of a transducer, mainly a resistive or capacitive transducer coated with a thin film of specific functional materials. Functional materials can change their electrical, optical, magnetic, or mechanical properties based on the stimuli received. In a chemi-resistive or chemi-capacitive gas sensing system, thin film of functional materials coated on the transducers are a class of materials that can change the resistivity or dielectric properties of the adsorption or chemisorption of volatile organic compounds such as methanol and ethanol. A combination of efficient design of the MEMS transducer, read-out system, and robust sensing material is a key requirement for the development of good and reliable sensors. In this thesis, the study of thin-film dielectric and semiconducting nanoparticles integrated on MEMS transducers for the detection of volatile organic compounds (VOCs), namely ethanol and methanol vapors are presented.
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Zhang, G.Q., Supervisor
  • Bossche, A., Advisor
Award date21 Mar 2022
DOIs
Publication statusPublished - 2022

Keywords

  • Metal Organic Framework
  • SnO2 nanoparticles
  • MEMS gas sensor

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