Galvanic cell formation: a review of approaches to silicon etching for sensor fabrication

JJ Kelly, XH Xia, CMA Ashruf, PJ French

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{77ef1ad1966c4765a07a4b63d36f0631,

title = "Galvanic cell formation: a review of approaches to silicon etching for sensor fabrication",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "JJ Kelly and XH Xia and CMA Ashruf and PJ French",

year = "2001",

language = "Undefined/Unknown",

volume = "1",

pages = "127--142",

journal = "IEEE Sensors Journal",

issn = "1530-437X",

publisher = "IEEE",

number = "2",

}