Galvanic etch stop for Si in KOH

E Connolly, PJ French, JJ Kelly

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1215-1219
Number of pages5
JournalJournal of Micromechanics and Microengineering
Volume14
Publication statusPublished - 2004

Keywords

  • ZX CWTS 1.00 <= JFIS < 3.00

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