Galvanic etch stop in KOH with reduced au area using NaOCI

E Connolly, PJ French, XH Xia, JJ Kelly

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Eurosensors 2002
Place of Publication	Prague
Publisher	Czech Technical University
Pages	443-446
Number of pages	4
ISBN (Print)	80-01-02576-4
Publication status	Published - 2002
Event	16th European conference on sold-state transducers - Prague Duration: 15 Sept 2002 → 18 Sept 2002

Name
Publisher	Czech Technical University

Conference	16th European conference on sold-state transducers
Period	15/09/02 → 18/09/02

Keywords

@inproceedings{906b8e81e34b4646a881bbfa10634aae,

title = "Galvanic etch stop in KOH with reduced au area using NaOCI",

keywords = "Conf.proc. > 3 pag",

author = "E Connolly and PJ French and XH Xia and JJ Kelly",

year = "2002",

language = "Undefined/Unknown",

isbn = "80-01-02576-4",

publisher = "Czech Technical University",

pages = "443--446",

booktitle = "Eurosensors 2002",

note = "16th European conference on sold-state transducers ; Conference date: 15-09-2002 Through 18-09-2002",

}

TY - GEN

T1 - Galvanic etch stop in KOH with reduced au area using NaOCI

AU - Connolly, E

AU - French, PJ

AU - Xia, XH

AU - Kelly, JJ

PY - 2002

Y1 - 2002

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 80-01-02576-4

SP - 443

EP - 446

BT - Eurosensors 2002

PB - Czech Technical University

CY - Prague

T2 - 16th European conference on sold-state transducers

Y2 - 15 September 2002 through 18 September 2002

ER -