Galvanic etching for sensor fabrication

CMA Ashruf, PJ French, PM Sarro, R Kazinczi, XH Xia, JJ Kelly

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	505-515
Number of pages	11
Journal	Journal of Micromechanics and Microengineering
Volume	10
Publication status	Published - 2000

Keywords

@article{f0a71277f3c641d79e0f3f7b98498b8e,

title = "Galvanic etching for sensor fabrication",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "CMA Ashruf and PJ French and PM Sarro and R Kazinczi and XH Xia and JJ Kelly",

year = "2000",

language = "Undefined/Unknown",

volume = "10",

pages = "505--515",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

}