Galvanic etching of silicon for fabrication of micromechanical structures

CMA Ashruf

Research output: ThesisDissertation (TU Delft)

Original languageUndefined/Unknown
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
  • French, P.J., Supervisor
  • Kelly, JJ, Advisor, External person
  • Middelhoek, S, Advisor, External person
Award date1 Jan 2000
Place of PublicationDelft
Print ISBNs90-407-2001-0
Publication statusPublished - 2000


  • Diss. prom. aan TU Delft

Cite this