Galvanic etching of silicon for fabrication of micromechanical structures

CMA Ashruf

Research output: Thesis › Dissertation (TU Delft)

Original language	Undefined/Unknown
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	French, P.J., Supervisor Kelly, JJ, Advisor, External person Middelhoek, S, Advisor, External person
Award date	1 Jan 2000
Place of Publication	Delft
Publisher	Delft University Press
Print ISBNs	90-407-2001-0
Publication status	Published - 2000

Keywords

@phdthesis{cfbd86e4b2a64b59a802f2d1ff5362d1,

title = "Galvanic etching of silicon for fabrication of micromechanical structures",

keywords = "Diss. prom. aan TU Delft",

author = "CMA Ashruf",

year = "2000",

language = "Undefined/Unknown",

isbn = "90-407-2001-0",

publisher = "Delft University Press",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}