Gas-phase chemistry in up-scaled plasma enhanced metal-organic chemical-vapor deposition of TiN and Ti(C,N) on tool steel.

J Driessen, AD Kuypers, J Schoonman

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1971-1976
Number of pages	6
Journal	Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films
Volume	18
Issue number	4
Publication status	Published - 2000

(0734-2101 American Vacuum Society)

Keywords

@article{1739667ee99141a6b9cd55020f9d5f0f,

title = "Gas-phase chemistry in up-scaled plasma enhanced metal-organic chemical-vapor deposition of TiN and Ti(C,N) on tool steel.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "J Driessen and AD Kuypers and J Schoonman",

note = "(0734-2101 American Vacuum Society)",

year = "2000",

language = "Undefined/Unknown",

volume = "18",

pages = "1971--1976",

journal = "Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "4",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Gas-phase chemistry in up-scaled plasma enhanced metal-organic chemical-vapor deposition of TiN and Ti(C,N) on tool steel.

AU - Driessen, J

AU - Kuypers, AD

AU - Schoonman, J

N1 - (0734-2101 American Vacuum Society)

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Article

SN - 0734-2101

VL - 18

SP - 1971

EP - 1976

JO - Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films

JF - Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films

IS - 4

ER -