Gas-phase chemistry in up-scaled plasma enhanced metal-organic chemical-vapor deposition of TiN and Ti(C,N) on tool steel.

J Driessen, AD Kuypers, J Schoonman

    Research output: Contribution to journalArticleScientificpeer-review

    6 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1971-1976
    Number of pages6
    JournalJournal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films
    Volume18
    Issue number4
    Publication statusPublished - 2000

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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