Gas-phase deposition of thin aluminium oxide films at ambient conditions

Research output: ThesisDissertation (TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
  • Kreutzer, M.T., Supervisor
  • van Ommen, J.R., Advisor
  • Meesters, G.M.H., Advisor
Award date4 Nov 2015
Place of Publications.l.
Print ISBNs978-94-6186-564-9
Publication statusPublished - 2015

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