Gas viscosity MEMS sensor based on pull-in

RA Dias; G de Graaf; RF Wolffenbuttel; LA Machado da Rocha

doi:10.1109/Transducers.2013.6626933

Gas viscosity MEMS sensor based on pull-in

RA Dias, G de Graaf, RF Wolffenbuttel, LA Machado da Rocha

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Original language	English
Title of host publication	Proceedings - 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers & Eurosensors XXVII)
Editors	JR Morante
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE
Pages	980-983
Number of pages	4
ISBN (Print)	978-1-4673-5983-2
DOIs	https://doi.org/10.1109/Transducers.2013.6626933
Publication status	Published - 2013
Event	Transducers 2013 & Eurosensors XXVII, Barcelona, Spain - Piscataway, NJ, USA Duration: 16 Jun 2013 → 20 Jun 2013

Publication series

Name
Publisher	IEEE

Conference

Conference	Transducers 2013 & Eurosensors XXVII, Barcelona, Spain
Period	16/06/13 → 20/06/13

Bibliographical note

Harvest

Access to Document

10.1109/Transducers.2013.6626933

Cite this

@inproceedings{8059c061a8734aaa879f24d66ad6dca4,

title = "Gas viscosity MEMS sensor based on pull-in",

author = "RA Dias and {de Graaf}, G and RF Wolffenbuttel and {Machado da Rocha}, LA",

note = "Harvest; Transducers 2013 & Eurosensors XXVII, Barcelona, Spain ; Conference date: 16-06-2013 Through 20-06-2013",

year = "2013",

doi = "10.1109/Transducers.2013.6626933",

language = "English",

isbn = "978-1-4673-5983-2",

publisher = "IEEE",

pages = "980--983",

editor = "JR Morante",

booktitle = "Proceedings - 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers & Eurosensors XXVII)",

address = "United States",

}

Dias, RA, de Graaf, G , Wolffenbuttel, RF & Machado da Rocha, LA 2013, Gas viscosity MEMS sensor based on pull-in. in JR Morante (ed.), Proceedings - 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers & Eurosensors XXVII). IEEE, Piscataway, NJ, USA, pp. 980-983, Transducers 2013 & Eurosensors XXVII, Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6626933

Gas viscosity MEMS sensor based on pull-in. / Dias, RA; de Graaf, G ; Wolffenbuttel, RF et al.
Proceedings - 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers & Eurosensors XXVII). ed. / JR Morante. Piscataway, NJ, USA: IEEE, 2013. p. 980-983.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Gas viscosity MEMS sensor based on pull-in

AU - Dias, RA

AU - de Graaf, G

AU - Wolffenbuttel, RF

AU - Machado da Rocha, LA

N1 - Harvest

PY - 2013

Y1 - 2013

U2 - 10.1109/Transducers.2013.6626933

DO - 10.1109/Transducers.2013.6626933

M3 - Conference contribution

SN - 978-1-4673-5983-2

SP - 980

EP - 983

BT - Proceedings - 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers & Eurosensors XXVII)

A2 - Morante, JR

PB - IEEE

CY - Piscataway, NJ, USA

T2 - Transducers 2013 & Eurosensors XXVII, Barcelona, Spain

Y2 - 16 June 2013 through 20 June 2013

ER -