Gas viscosity sensing based on the electrostatic pull-in timeof microactuators

RA Dias, G de Graaf, RF Wolffenbuttel, LA Machado da Rocha

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)376-385
Number of pages10
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Publication statusPublished - 2014

Bibliographical note

Available online 14-5-2014

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