Gas viscosity sensing based on the electrostatic pull-in timeof microactuators

RA Dias, G de Graaf, RF Wolffenbuttel, LA Machado da Rocha

Research output: Contribution to journal › Article › Scientific › peer-review

7 Citations (SciVal)

Original language	English
Pages (from-to)	376-385
Number of pages	10
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	216
DOIs	https://doi.org/10.1016/j.sna.2014.05.004
Publication status	Published - 2014

Harvest
Available online 14-5-2014

Access to Document

@article{2bdb305dcb63456baf63ab68f16d1417,

title = "Gas viscosity sensing based on the electrostatic pull-in timeof microactuators",

author = "RA Dias and {de Graaf}, G and RF Wolffenbuttel and {Machado da Rocha}, LA",

note = "Harvest Available online 14-5-2014",

year = "2014",

doi = "10.1016/j.sna.2014.05.004",

language = "English",

volume = "216",

pages = "376--385",

journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",

issn = "0924-4247",

publisher = "Elsevier",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Gas viscosity sensing based on the electrostatic pull-in timeof microactuators

AU - Dias, RA

AU - de Graaf, G

AU - Wolffenbuttel, RF

AU - Machado da Rocha, LA

N1 - Harvest Available online 14-5-2014

PY - 2014

Y1 - 2014

U2 - 10.1016/j.sna.2014.05.004

DO - 10.1016/j.sna.2014.05.004

M3 - Article

SN - 0924-4247

VL - 216

SP - 376

EP - 385

JO - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

JF - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

ER -