Ge-on-Si: Single-crystal selective epitaxial growth in a CVD reactor

A Sammak, WB De Boer, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

8 Citations (Scopus)
Original languageEnglish
Title of host publicationElectro-Chemical Society (ECS) Meeting Abstracts, MA2012.02
PublisherECS
Pages#3162-1-#3162-1
Publication statusPublished - 2012

Publication series

Name
PublisherECS

Keywords

  • Geen BTA classificatie

Cite this

Sammak, A., De Boer, WB., & Nanver, LK. (2012). Ge-on-Si: Single-crystal selective epitaxial growth in a CVD reactor. In Electro-Chemical Society (ECS) Meeting Abstracts, MA2012.02 (pp. #3162-1-#3162-1). ECS.