Ge-on-Si: Single-crystal selective epitaxial growth in a CVD reactor

A Sammak, WB De Boer, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	English
Title of host publication	Electro-Chemical Society (ECS) Meeting Abstracts, MA2012.02
Publisher	ECS
Pages	#3162-1-#3162-1
Publication status	Published - 2012

Name
Publisher	ECS

Keywords

@inproceedings{4129b6a3defa441384556cc81f89d09a,

title = "Ge-on-Si: Single-crystal selective epitaxial growth in a CVD reactor",

keywords = "Geen BTA classificatie",

author = "A Sammak and {De Boer}, WB and LK Nanver",

year = "2012",

language = "English",

publisher = "ECS",

pages = "#3162--1--#3162--1",

booktitle = "Electro-Chemical Society (ECS) Meeting Abstracts, MA2012.02",

}