General imaging of advanced 3D mask object based on the fully-vectorial extended Nijboer-Zernike (ENZ) theory.

S van Haver, OTA Janssen, JJM Braat, AJEM Janssen, HP Urbach, SF Pereira

Research output: Contribution to journalConference articleScientificpeer-review

3 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1-8
Number of pages8
JournalProceedings of SPIE- International Society for Optical Engineering
Issue number35
Publication statusPublished - 2008


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