Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers

A Berthold, L Nicola, PM Sarro, MJ Vellekoop

Research output: Contribution to journalArticleScientificpeer-review

87 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)224-238
Number of pages15
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume82
Issue number1-3
Publication statusPublished - 2000

Keywords

  • ZX Int.klas.verslagjaar < 2002

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