@article{b5901f778a824bd19776cd73d19b8473,
title = "Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "A Berthold and L Nicola and PM Sarro and MJ Vellekoop",
year = "2000",
language = "Undefined/Unknown",
volume = "82",
pages = "224--238",
journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",
issn = "0924-4247",
publisher = "Elsevier",
number = "1-3",
}