Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition

Cristiano Glessi, Aya Mahgoub, Cornelis W. Hagen, Mats Tilset

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Abstract

Seven gold(I) N-heterocyclic carbene (NHC) complexes were synthesized, characterized, and identified as suitable precursors for focused electron beam-induced deposition (FEBID). Several variations on the core Au(NHC)X moiety were introduced, that is, variations of the NHC ring (imidazole or triazole), of the alkyl N-substituents (Me, Et, or iPr), and of the ancillary ligand X (Cl, Br, I, or CF3). The seven complexes were tested as FEBID precursors in an on-substrate custom setup. The effect of the substitutions on deposit composition and growth rate indicates that the most suitable organic ligand for the gold precursor is triazole-based, with the best deposit composition of 15 atom % gold, while the most suitable anionic ligand is the trifluoromethyl group, leading to a growth rate of 1 × 10−2 nm3/e.

Original languageEnglish
Pages (from-to)257-269
JournalBeilstein Journal of Nanotechnology
Volume12
DOIs
Publication statusPublished - 2021

Keywords

  • Au(I) precursors
  • focused electron beam-induced deposition (FEBID)
  • gold precursors
  • gold-NHC
  • N-heterocyclic carbene
  • nanofabrication

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