Growth kinetics and mechanisms of aluminium-oxide films formed by thermal oxidation of aluminium

LPH Jeurgens, WG Sloof, FD Tichelaar, EJ Mittemeijer

    Research output: Contribution to journalArticleScientificpeer-review

    235 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1649-1656
    Number of pages8
    JournalJournal of Applied Physics
    Volume92
    Publication statusPublished - 2002

    Keywords

    • ZX CWTS 1.00 <= JFIS < 3.00

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