Growth mechanism of cavities in MeV helium implanted silicon

J Grisolia, A Claverie, G Ben-Assayag, E Ntsoenzok, F Labohm, A van Veen

    Research output: Contribution to journalArticleScientific

    17 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)9027-9030
    Number of pages4
    JournalJournal of Applied Physics
    Publication statusPublished - 2002


    • ZX CWTS 1.00 <= JFIS < 3.00

    Cite this