Growth mechanism of cavities in MeV helium implanted silicon

J Grisolia, A Claverie, G Ben-Assayag, E Ntsoenzok, F Labohm, A van Veen

Research output: Contribution to journal › Article › Scientific

Keywords

@article{9a2c83f723f24419b76a08ecefc6d66d,

title = "Growth mechanism of cavities in MeV helium implanted silicon",

keywords = "ZX CWTS 1.00 <= JFIS < 3.00",

author = "J Grisolia and A Claverie and G Ben-Assayag and E Ntsoenzok and F Labohm and {van Veen}, A",

year = "2002",

language = "Undefined/Unknown",

volume = "91",

pages = "9027--9030",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "AIP Publishing",

}