Harmonic displacement of a parallel-plate electrostatic actuator using a pre-distorted sine wave oscillator

G de Graaf, L Mol, LA Rocha, E Cretu, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	MME 2004; Proceedings of the 15th micromechanics Europe workshop
Place of Publication	s.l.
Publisher	s.n.
Pages	53-56
Number of pages	4
ISBN (Print)	90-5682-535-6
Publication status	Published - 2004
Event	15th Micromechanics Europe workshop, Leuven, Belgium - s.l. Duration: 5 Sept 2004 → 7 Sept 2004

Name
Publisher	s.n.

Conference	15th Micromechanics Europe workshop, Leuven, Belgium
Period	5/09/04 → 7/09/04

ed. is niet bekend

Keywords

@inproceedings{e8357132c7e04ed6b5ac4ace1ecdb826,

title = "Harmonic displacement of a parallel-plate electrostatic actuator using a pre-distorted sine wave oscillator",

keywords = "Conf.proc. > 3 pag",

author = "{de Graaf}, G and L Mol and LA Rocha and E Cretu and RF Wolffenbuttel",

note = "ed. is niet bekend; 15th Micromechanics Europe workshop, Leuven, Belgium ; Conference date: 05-09-2004 Through 07-09-2004",

year = "2004",

language = "Undefined/Unknown",

isbn = "90-5682-535-6",

publisher = "s.n.",

pages = "53--56",

booktitle = "MME 2004; Proceedings of the 15th micromechanics Europe workshop",

}

TY - GEN

T1 - Harmonic displacement of a parallel-plate electrostatic actuator using a pre-distorted sine wave oscillator

AU - de Graaf, G

AU - Mol, L

AU - Rocha, LA

AU - Cretu, E

AU - Wolffenbuttel, RF

N1 - ed. is niet bekend

PY - 2004

Y1 - 2004

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 90-5682-535-6

SP - 53

EP - 56

BT - MME 2004; Proceedings of the 15th micromechanics Europe workshop

PB - s.n.

CY - s.l.

T2 - 15th Micromechanics Europe workshop, Leuven, Belgium

Y2 - 5 September 2004 through 7 September 2004

ER -