Heat transfer in very low pressure stagnation flow CVD reactors

R Dorsman, CR Kleijn

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Original languageUndefined/Unknown
    Title of host publicationProceedings of the XVI International Conference on Chemical Vapor Deposition
    Editors M. Allendorf et al.
    PublisherElectrochemical Society
    Number of pages8
    ISBN (Print)1-56677-380-6
    Publication statusPublished - 2003

    Publication series

    PublisherElectrochemical Society 2003-08


    • Conf.proc. > 3 pag

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