Heat transfer in very low pressure stagnation flow CVD reactors

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of the XVI International Conference on Chemical Vapor Deposition
Editors	M. Allendorf et al.
Publisher	Electrochemical Society
Pages	171-178
Number of pages	8
ISBN (Print)	1-56677-380-6
Publication status	Published - 2003

Name
Publisher	Electrochemical Society 2003-08

Keywords

@inproceedings{dc7140ed7598460f9110e08a86d0583a,

title = "Heat transfer in very low pressure stagnation flow CVD reactors",

keywords = "Conf.proc. > 3 pag",

author = "R Dorsman and CR Kleijn",

year = "2003",

language = "Undefined/Unknown",

isbn = "1-56677-380-6",

publisher = "Electrochemical Society",

pages = "171--178",

editor = "{M. Allendorf et al.}",

booktitle = "Proceedings of the XVI International Conference on Chemical Vapor Deposition",

}