Helium and hydrogen implantation effects in silicon carbide

AV Fedorov, A van Veen

    Research output: Book/Report › Report › Professional

    Original languageUndefined/Unknown
    Place of PublicationDelft
    PublisherIRI-TUDELFT
    Number of pages17
    VolumeIRI
    Publication statusPublished - 2002

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    PublisherIRI-TUDELFT

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