Helium implantation defects in SiC studied by thermal helium desorption

E Oliveiro, A van Veen, AV Fedorov, MF Beaufort, JF Barbot

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	223-228
Number of pages	6
Journal	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	186
Publication status	Published - 2002

Keywords

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title = "Helium implantation defects in SiC studied by thermal helium desorption",

keywords = "ZX CWTS JFIS < 1.00",

author = "E Oliveiro and {van Veen}, A and AV Fedorov and MF Beaufort and JF Barbot",

year = "2002",

language = "Undefined/Unknown",

volume = "186",

pages = "223--228",

journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

}

TY - JOUR

T1 - Helium implantation defects in SiC studied by thermal helium desorption

AU - Oliveiro, E

AU - van Veen, A

AU - Fedorov, AV

AU - Beaufort, MF

AU - Barbot, JF

PY - 2002

Y1 - 2002

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 0168-583X

VL - 186

SP - 223

EP - 228

JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

ER -