Helium implantation defects in SiC studied by thermal helium desorption

E Oliveiro, A van Veen, AV Fedorov, MF Beaufort, JF Barbot

    Research output: Contribution to journalArticleScientificpeer-review

    32 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)223-228
    Number of pages6
    JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Volume186
    Publication statusPublished - 2002

    Keywords

    • ZX CWTS JFIS < 1.00

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