Helium implantation in silicon: the effects of implantation temperature

E Oliviero, ML David, AV Fedorov, A van Veen, MF Beaufort, JF Barbot

    Research output: Contribution to journalArticleScientificpeer-review

    6 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)222-227
    Number of pages6
    JournalMaterials Science and Engineering B: Advanced Functional Solid-state Materials
    Publication statusPublished - 2003


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