Helium implantation induced defects in Si and SiC studied by thermal helium desorption spectroscopy

E Oliveiro, A van Veen, AV Fedorov

Research output: Book/Report › Report › Scientific

IRI-DM-2001-003

Keywords

@book{070ea283a1c04c4495246fa09dfd9234,

title = "Helium implantation induced defects in Si and SiC studied by thermal helium desorption spectroscopy",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "E Oliveiro and {van Veen}, A and AV Fedorov",

note = "IRI-DM-2001-003",

year = "2001",

language = "Undefined/Unknown",

publisher = "Unknown Publisher",

}

TY - BOOK

T1 - Helium implantation induced defects in Si and SiC studied by thermal helium desorption spectroscopy

AU - Oliveiro, E

AU - van Veen, A

AU - Fedorov, AV

N1 - IRI-DM-2001-003

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Report

BT - Helium implantation induced defects in Si and SiC studied by thermal helium desorption spectroscopy

PB - Unknown Publisher

ER -