Helium-ion-beam-induced growth of 3-dimensional AFM probes

G. Nanda, E. van Veldhoven, D. Maas, R. Herfst, Hamed Sadeghian Marnani, P.F.A. Alkemade

Research output: Contribution to conferenceAbstractScientific

24 Downloads (Pure)
Original languageEnglish
Pages105-106
Publication statusPublished - 2016
Event13th International Workshop on Nanomechanical Sensing - Delft, Netherlands
Duration: 22 Jun 201624 Jun 2016

Workshop

Workshop13th International Workshop on Nanomechanical Sensing
Abbreviated titleNMC 2016
CountryNetherlands
CityDelft
Period22/06/1624/06/16

Keywords

  • 3D-AFM
  • ion beam induced deposition
  • helium ion microscope
  • metrology

Cite this

Nanda, G., Veldhoven, E. V., Maas, D., Herfst, R., Sadeghian Marnani, H., & Alkemade, P. F. A. (2016). Helium-ion-beam-induced growth of 3-dimensional AFM probes. 105-106. Abstract from 13th International Workshop on Nanomechanical Sensing, Delft, Netherlands.