Helium-ion-beam-induced growth of 3-dimensional AFM probes

G. Nanda, E. van Veldhoven, D. Maas, R. Herfst, Hamed Sadeghian Marnani, P.F.A. Alkemade

Research output: Contribution to conference › Abstract › Scientific

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Original language	English
Pages	105-106
Publication status	Published - 2016
Event	13th International Workshop on Nanomechanical Sensing - Delft, Netherlands Duration: 22 Jun 2016 → 24 Jun 2016

Workshop	13th International Workshop on Nanomechanical Sensing
Abbreviated title	NMC 2016
Country/Territory	Netherlands
City	Delft
Period	22/06/16 → 24/06/16

Keywords

@conference{f43d1657520246ffb8299c7d8a756f9e,

title = "Helium-ion-beam-induced growth of 3-dimensional AFM probes",

keywords = "3D-AFM, ion beam induced deposition, helium ion microscope, metrology",

author = "G. Nanda and Veldhoven, {E. van} and D. Maas and R. Herfst and {Sadeghian Marnani}, Hamed and P.F.A. Alkemade",

year = "2016",

language = "English",

pages = "105--106",

note = "13th International Workshop on Nanomechanical Sensing, NMC 2016 ; Conference date: 22-06-2016 Through 24-06-2016",

}

TY - CONF

T1 - Helium-ion-beam-induced growth of 3-dimensional AFM probes

AU - Nanda, G.

AU - Veldhoven, E. van

AU - Maas, D.

AU - Herfst, R.

AU - Sadeghian Marnani, Hamed

AU - Alkemade, P.F.A.

PY - 2016

Y1 - 2016

KW - 3D-AFM

KW - ion beam induced deposition

KW - helium ion microscope

KW - metrology

UR - http://resolver.tudelft.nl/uuid:f43d1657-5202-46ff-b829-9c7d8a756f9e

M3 - Abstract

SP - 105

EP - 106

T2 - 13th International Workshop on Nanomechanical Sensing

Y2 - 22 June 2016 through 24 June 2016

ER -