Helium ion beam induced growth of hammerhead AFM probes

G Nanda; E van Veldhoven; D Maas; H Sadeghian; PFA Alkemade

doi:10.1116/1.4936068

Helium ion beam induced growth of hammerhead AFM probes

G Nanda, E van Veldhoven, D Maas, H Sadeghian, PFA Alkemade

QN/Kavli Nanolab Delft

Research output: Contribution to journal › Article › Scientific › peer-review

13 Citations (SciVal)

Original language	English
Pages (from-to)	1-5
Number of pages	5
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	33
Issue number	6
DOIs	https://doi.org/10.1116/1.4936068
Publication status	Published - 2015

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Harvest

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title = "Helium ion beam induced growth of hammerhead AFM probes",

author = "G Nanda and Veldhoven, {E van} and D Maas and H Sadeghian and PFA Alkemade",

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language = "English",

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T1 - Helium ion beam induced growth of hammerhead AFM probes

AU - Nanda, G

AU - Veldhoven, E van

AU - Maas, D

AU - Sadeghian, H

AU - Alkemade, PFA

N1 - Harvest

PY - 2015

Y1 - 2015

UR - http://resolver.tudelft.nl/uuid:0239f9cc-0df8-44c7-981e-0403ae3189c3

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M3 - Article

SN - 1071-1023

VL - 33

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JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -

Helium ion beam induced growth of hammerhead AFM probes

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