Helium Ion Beam Processing for Nanofabrication and Beam-Induced Chemistry

PFA Alkemade, VA Sidorkin, P Chen, EWJM van der Drift, AK van Langen-Suurling, D Maas, E van Veldhoven

Research output: Contribution to journalArticleScientificpeer-review

Original languageUndefined/Unknown
Pages (from-to)?-?
JournalMicroscopy and Analysis
Issue number7
Publication statusPublished - 2010


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