Helium Ion Beam Processing for Nanofabrication and Beam-Induced Chemistry

PFA Alkemade, VA Sidorkin, P Chen, EWJM van der Drift, AK van Langen-Suurling, D Maas, E van Veldhoven

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{38e69ae393544cb996a7d8cec31b7c7b,

title = "Helium Ion Beam Processing for Nanofabrication and Beam-Induced Chemistry",

keywords = "academic journal papers",

author = "PFA Alkemade and VA Sidorkin and P Chen and {van der Drift}, EWJM and {van Langen-Suurling}, AK and D Maas and Veldhoven, {E van}",

year = "2010",

language = "Undefined/Unknown",

volume = "24",

pages = "?--?",

journal = "Microscopy and Analysis",

issn = "0958-1952",

number = "7",

}

TY - JOUR

T1 - Helium Ion Beam Processing for Nanofabrication and Beam-Induced Chemistry

AU - Alkemade, PFA

AU - Sidorkin, VA

AU - Chen, P

AU - van der Drift, EWJM

AU - van Langen-Suurling, AK

AU - Maas, D

AU - Veldhoven, E van

PY - 2010

Y1 - 2010

KW - academic journal papers

M3 - Article

SN - 0958-1952

VL - 24

SP - ?-?

JO - Microscopy and Analysis

JF - Microscopy and Analysis

IS - 7

ER -