Helium on lithography

Research output: Chapter in Book/Conference proceedings/Edited volumeChapterScientific

Original languageEnglish
Title of host publicationNano-fabrication, techniques and principles
EditorsM Stepanova, S Dew
Place of Publications.l.
PublisherSpringer Science+Business Media
Pages93-116
Number of pages344
ISBN (Print)978-3-7091-0423-1
Publication statusPublished - 2011

Keywords

  • Vakpubl., Overig wet. > 3 pag

Cite this