Helium on lithography

Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific

Original language	English
Title of host publication	Nano-fabrication, techniques and principles
Editors	M Stepanova, S Dew
Place of Publication	s.l.
Publisher	Springer
Pages	93-116
Number of pages	344
ISBN (Print)	978-3-7091-0423-1
Publication status	Published - 2011

Keywords

@inbook{98d2ddbca93d4687b598d5734a7b5e48,

title = "Helium on lithography",

keywords = "Vakpubl., Overig wet. > 3 pag",

author = "{van der Drift}, EWJM and D.J. Maas",

year = "2011",

language = "English",

isbn = "978-3-7091-0423-1",

pages = "93--116",

editor = "M Stepanova and S Dew",

booktitle = "Nano-fabrication, techniques and principles",

publisher = "Springer",

}