Heterogeneous Integration of Diamond Heat Spreaders for Power Electronics Application

Henry Martin, Marcia Reintjes, Dave Reijs, Sander Dorrestein, Martien Kengen, Sebastien Libon, Edsger Smits, Xiao Tang, Marco Koelink, Rene Poelma, Willem Van Driel, Guo Qi Zhang

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

3 Citations (Scopus)
65 Downloads (Pure)

Abstract

Integrated Circuits and Electronic Modules experience concentrated thermal hot spots, which require advanced thermal solutions for effective distribution and dissipation of heat. The superior thermal properties of diamonds are long known, and it is an ideal material for heat-spreading applications. However, growing diamond films to the electronic substrate require complex processing at high temperatures. This research investigates a heterogeneous method of integrating diamond heat spreaders during the back-end packaging process. The semiconductor substrate and the heat spreader thicknesses were optimized based on simulations to realize a thermally enhanced Power Quad-Flat No-Lead package. The performance of the thermally enhanced PQFN was assessed by monitoring the temperature distribution across the active device surface and compared to a standard PQFN (without a heat spreader). Firstly, the thermally enhanced PQFN indicated a 9.6% reduction in junction temperature for an input power of 6.6W with a reduced thermal gradient on the active device surface. Furthermore, the diamond heat spreader's efficiency was observed to increase with increasing power input. Besides, the reliability of the thermally enhanced PQFN was tested by thermal cycling from -55°C to 150°C, which resulted in less than 2% thermal degradation over two-hundred cycles. Such choreographed thermal solutions are proven to enhance the packaged device's performance, and the superior thermal properties of the diamond are beneficial to suffice the increasing demand for high power.

Original languageEnglish
Title of host publicationProceedings - IEEE 73rd Electronic Components and Technology Conference, ECTC 2023
PublisherIEEE
Pages118-125
Number of pages8
ISBN (Electronic)9798350334982
DOIs
Publication statusPublished - 2023
Event73rd IEEE Electronic Components and Technology Conference, ECTC 2023 - Orlando, United States
Duration: 30 May 20232 Jun 2023

Publication series

NameProceedings - Electronic Components and Technology Conference
Volume2023-May
ISSN (Print)0569-5503

Conference

Conference73rd IEEE Electronic Components and Technology Conference, ECTC 2023
Country/TerritoryUnited States
CityOrlando
Period30/05/232/06/23

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

  • Advanced packaging
  • Advanced thermal solutions
  • CVD Diamonds
  • Thermal Test Chips

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