@inproceedings{5480e73bcdd1403ca62706db8bc4af19,
title = "High accuracy dual side overlay with wet anisotropic etching for HAR MEMS",
author = "{van Zeijl}, HW and K Best and PM Sarro",
note = "harvest; NSIT-Nanotech 2012, St. Clara, CA, USA ; Conference date: 18-06-2012 Through 21-06-2012",
year = "2012",
language = "English",
isbn = "978-146656275-2",
publisher = "NSTI",
pages = "180--183",
editor = "{Gaura et al}, EI",
booktitle = "Technical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, Volume 2",
}