High accuracy dual side overlay with wet anisotropic etching for HAR MEMS

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationTechnical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, Volume 2
EditorsEI Gaura et al
Place of PublicationAustin, TX, USA
PublisherNSTI
Pages180-183
Number of pages4
ISBN (Print)978-146656275-2
Publication statusPublished - 2012
EventNSIT-Nanotech 2012, St. Clara, CA, USA - Austin, TX, USA
Duration: 18 Jun 201221 Jun 2012

Publication series

Name
PublisherNSTI

Conference

ConferenceNSIT-Nanotech 2012, St. Clara, CA, USA
Period18/06/1221/06/12

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