High-aspect-ratio bulk micromachined vias contacts

NP Pham; PM Sarro

High-aspect-ratio bulk micromachined vias contacts

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE 2004; Semiconductor advances for future electronics
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	657-661
Number of pages	5
ISBN (Print)	90-73461-43X
Publication status	Published - 2004
Event	Semiconductor advances for future electronics, Veldhoven, The Netherlands - Utrecht Duration: 25 Nov 2004 → 26 Nov 2004

Publication series

Name
Publisher	STW Technology Foundation

Conference

Conference	Semiconductor advances for future electronics, Veldhoven, The Netherlands
Period	25/11/04 → 26/11/04

Bibliographical note

ed. is niet bekend

Keywords

Vakpubl., Overig wet. > 3 pag

Cite this

@inproceedings{4a65508a8ad64f038ca49af7002b04b8,

title = "High-aspect-ratio bulk micromachined vias contacts",

keywords = "Vakpubl., Overig wet. > 3 pag",

author = "NP Pham and PM Sarro",

note = "ed. is niet bekend; Semiconductor advances for future electronics, Veldhoven, The Netherlands ; Conference date: 25-11-2004 Through 26-11-2004",

year = "2004",

language = "Undefined/Unknown",

isbn = "90-73461-43X",

publisher = "STW Technology Foundation",

pages = "657--661",

booktitle = "SAFE 2004; Semiconductor advances for future electronics",

}

TY - GEN

T1 - High-aspect-ratio bulk micromachined vias contacts

AU - Pham, NP

AU - Sarro, PM

N1 - ed. is niet bekend

PY - 2004

Y1 - 2004

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 90-73461-43X

SP - 657

EP - 661

BT - SAFE 2004; Semiconductor advances for future electronics

PB - STW Technology Foundation

CY - Utrecht

T2 - Semiconductor advances for future electronics, Veldhoven, The Netherlands

Y2 - 25 November 2004 through 26 November 2004

ER -