High aspect-ratio MEMS devices for the next generation of THz/MHz passive components

G Fiorentino

Research output: ThesisDissertation (TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Sarro, P.M., Supervisor
Award date16 Jun 2015
Place of PublicationDelft
Publisher
Print ISBNs978-94-6186-478-9
DOIs
Publication statusPublished - 2015

Keywords

  • Diss. prom. aan TU Delft

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