@article{6de3beb08ad94b079f508a36ac34fc67,
title = "High-aspect-ratio through-wafer parylene beams for stretchable silicon electronics",
keywords = "Elektrotechniek, Techniek, CWTS 0.75 <= JFIS < 2.00",
author = "T Zoumpoulidis and M Bartek and {de Graaf}, P and R Dekker",
year = "2009",
language = "Undefined/Unknown",
volume = "156",
pages = "257--264",
journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",
issn = "0924-4247",
publisher = "Elsevier",
number = "1",
}