High-aspect-ratio through-wafer parylene beams for stretchable silicon electronics

T Zoumpoulidis, M Bartek, P de Graaf, R Dekker

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)257-264
Number of pages8
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume156
Issue number1
Publication statusPublished - 2009

Keywords

  • Elektrotechniek
  • Techniek
  • CWTS 0.75 <= JFIS < 2.00

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