High brightness 100-electron-beam-source for high resolution applications

Y Zhang, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    12 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)2239-2244
    Number of pages6
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume25
    Issue number6
    Publication statusPublished - 2007

    Keywords

    • academic journal papers
    • CWTS 0.75 <= JFIS < 2.00

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