High brightness 100-electron-beam-source for high resolution applications

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2239-2244
Number of pages	6
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	25
Issue number	6
Publication status	Published - 2007

Keywords

@article{0e15b75de819441d952008ce213c84c2,

title = "High brightness 100-electron-beam-source for high resolution applications",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "Y Zhang and P Kruit",

year = "2007",

language = "Undefined/Unknown",

volume = "25",

pages = "2239--2244",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - High brightness 100-electron-beam-source for high resolution applications

AU - Zhang, Y

AU - Kruit, P

PY - 2007

Y1 - 2007

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 1071-1023

VL - 25

SP - 2239

EP - 2244

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -