High depth resolution SIMS analysis with low-energy grazing O2+ beams

ZX Jiang, E Algra, PFA Alkemade, S Radelaar

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	285-291
Number of pages	7
Journal	Surface and Interface Analysis
Volume	25
Publication status	Published - 1997

Cite this

@article{fed4760e95e0445d90d7ccb9ce71686a,

title = "High depth resolution SIMS analysis with low-energy grazing O2+ beams",

author = "ZX Jiang and E Algra and PFA Alkemade and S Radelaar",

year = "1997",

language = "Undefined/Unknown",

volume = "25",

pages = "285--291",

journal = "Surface and Interface Analysis",

issn = "0142-2421",

publisher = "John Wiley & Sons",

}