High-NA lens characterization by through-focus intensity measurement

S van Haver, JJM Braat, P. Dirksen, AJEM Janssen

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	EOS Topical Meeting on Micro-Optics Diffractive Optics and Optical MEMS
Editors	H-P. Herzig
Place of Publication	Hannover
Publisher	EOS
Pages	56-57
Number of pages	2
ISBN (Print)	3-00-019532-7
Publication status	Published - 2006
Event	EOS Topical Meeting - Paris - Hannover Duration: 17 Oct 2006 → 19 Oct 2006

Name
Publisher	EOS

Name
Volume	TOM4

Conference	EOS Topical Meeting - Paris
Period	17/10/06 → 19/10/06

Keywords

@inproceedings{01e74a7468b44f85bca42d08482c9d41,

title = "High-NA lens characterization by through-focus intensity measurement",

keywords = "Geen BTA classificatie",

author = "{van Haver}, S and JJM Braat and P. Dirksen and AJEM Janssen",

year = "2006",

language = "Undefined/Unknown",

isbn = "3-00-019532-7",

publisher = "EOS",

pages = "56--57",

editor = "H-P. Herzig",

booktitle = "EOS Topical Meeting on Micro-Optics Diffractive Optics and Optical MEMS",

note = "EOS Topical Meeting - Paris ; Conference date: 17-10-2006 Through 19-10-2006",

}

TY - GEN

T1 - High-NA lens characterization by through-focus intensity measurement

AU - van Haver, S

AU - Braat, JJM

AU - Dirksen, P.

AU - Janssen, AJEM

PY - 2006

Y1 - 2006

KW - Geen BTA classificatie

M3 - Conference contribution

SN - 3-00-019532-7

SP - 56

EP - 57

BT - EOS Topical Meeting on Micro-Optics Diffractive Optics and Optical MEMS

A2 - Herzig, H-P.

PB - EOS

CY - Hannover

T2 - EOS Topical Meeting - Paris

Y2 - 17 October 2006 through 19 October 2006

ER -