High-Performance Flexible Strain Sensor Fabricated Using Laser Transmission Pyrolysis

Shaogang Wang, Huiru Yang, Qihang Zong, Qianming Huang, Chunjian Tan, Chenshan Gao, Shizhen Li, Huaiyu Ye, Guoqi Zhang, Paddy French

Research output: Contribution to journalArticleScientificpeer-review

Abstract

In recent years, metal crack-based stretchable flexible strain sensors have attracted significant attention in wearable device applications due to their extremely high sensitivity. However, the tradeoff between sensitivity and detection range has been an intractable dilemma, severely limiting their practical applications. Herein, we propose a laser transmission pyrolysis (LTP) technology for fabricating high-performance flexible strain sensors based on (Au) metal cracks with the microchannel array on the polydimethylsiloxane (PDMS) surface. The fabricated flexible strain sensors exhibit high sensitivity [gauge factor (GF) of 2448], wide detection range (59% for tensile strain), precise strain resolution (0.1%), fast response and recovery times (69 and 141 ms), and robust durability (over 3000 cycles). In addition, experiment and simulation results reveal that introducing a microchannel array enables the stress redistribution strategy on the sensor surface, which significantly improves the sensing sensitivity compared to conventional flat surface sensors. Based on the excellent performance, the sensors are applied to detect subtle physiological signals, such as pulse and swallowing, as well as to monitor large-scale motion signals, such as knee flexion and finger bending, demonstrating their potential applications in health monitoring, human-machine interactions, and electronic skin.

Original languageEnglish
Pages (from-to)7521-7529
Number of pages9
JournalIEEE Sensors Journal
Volume24
Issue number6
DOIs
Publication statusPublished - 2023

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

  • Laer transmission pyrolysis
  • Metal film
  • PDMS pattering
  • Stretchable strain sensors
  • UV laser

Fingerprint

Dive into the research topics of 'High-Performance Flexible Strain Sensor Fabricated Using Laser Transmission Pyrolysis'. Together they form a unique fingerprint.

Cite this