High Performance n- and p-channel Strained Single Grain Silicon TFTs using Excimer Laser

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationMaterials Research Society Symposium Proceedings, 2009
EditorsA Flewitt, Q Wang, J Hou, S Uchikoga, A Nathan
Place of PublicationWarrendale, PA
PublisherMaterials Research Society
Number of pages11
ISBN (Print)978-1-60511-126-1
Publication statusPublished - 2009

Publication series

PublisherMaterials Research Society


  • Conf.proc. > 3 pag

Cite this