High performance P-channel single-crystalline Si TFTs fabricated inside a location-controlled grain by ¿-czochralski process

V Rana, R Ishihara, Y Hiroshima, D Abe, S Inoue, T Shimoda, JW Metselaar, CIM Beenakker

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationSAFE 2003; Proceedings of sixth annual workshop on semiconductors advances for future electronics
Editors s.n.
Place of PublicationUtrecht
PublisherSTW
Pages639-642
Number of pages4
ISBN (Print)90-73461-39-1
Publication statusPublished - 2003
EventSixth annual workshop on semiconductors advances for future electronics, Veldhoven, The Netherlands - Utrecht
Duration: 25 Nov 200326 Nov 2003

Publication series

Name
PublisherSTW

Conference

ConferenceSixth annual workshop on semiconductors advances for future electronics, Veldhoven, The Netherlands
Period25/11/0326/11/03

Keywords

  • Conf.proc. > 3 pag

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