High-Performance Silicon Carbide-on-Insulator Thermoresistive High-Temperature Sensor up to 750 °C

Baoyun Sun; Jiarui Mo; Willem D. Van Driel; Guoqi Zhang

High-Performance Silicon Carbide-on-Insulator Thermoresistive High-Temperature Sensor up to 750 °C

Baoyun Sun^*, Jiarui Mo, Willem D. Van Driel, Guoqi Zhang

^*Corresponding author for this work

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

4 Downloads (Pure)

Abstract

Accurate and reliable high-temperature measurement in hostile environments is crucial in various fields of science and engineering. Here, an advanced thermoresistive high-temperature sensor based on a 3C-silicon carbide-on-insulator (3C-SiCOI) platform is demonstrated, with the highest temperature sensing ability reported to date among SiC temperature sensors. This SiCOI temperature sensor exhibits linear current-voltage (I-V) characteristics, small hysteresis error, high sensitivity and reliability in a wide temperature range varying from room temperature to 750 °C. The natural logarithm of the measured resistance of the sensor is found to vary linearly with temperatures up to 750 °C. This high-performance SiCOI temperature sensor enabled by simple, cost-effective fabrication processes provides a feasible route toward high-temperature sensing in harsh environments.

Original language	English
Title of host publication	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Publisher	IEEE
Pages	197-200
Number of pages	4
ISBN (Electronic)	9784886864352
Publication status	Published - 2023
Event	22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 - Kyoto, Japan Duration: 25 Jun 2023 → 29 Jun 2023

Publication series

Name	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Conference

Conference	22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Country/Territory	Japan
City	Kyoto
Period	25/06/23 → 29/06/23

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

High Temperature
Silicon Carbide-On-Insulator
Thermoresistive

Access to Document

High-Performance_Silicon_Carbide-on-Insulator_Thermoresistive_High-Temperature_Sensor_up_to_750_CFinal published version, 1.95 MB

Cite this

Sun, B., Mo, J., Van Driel, W. D., & Zhang, G. (2023). High-Performance Silicon Carbide-on-Insulator Thermoresistive High-Temperature Sensor up to 750 °C. In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 (pp. 197-200). (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023). IEEE.

Sun, Baoyun ; Mo, Jiarui ; Van Driel, Willem D. et al. / High-Performance Silicon Carbide-on-Insulator Thermoresistive High-Temperature Sensor up to 750 °C. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. IEEE, 2023. pp. 197-200 (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

@inproceedings{953a4066e98241d8b94a09611e72fe1e,

title = "High-Performance Silicon Carbide-on-Insulator Thermoresistive High-Temperature Sensor up to 750 °C",

abstract = "Accurate and reliable high-temperature measurement in hostile environments is crucial in various fields of science and engineering. Here, an advanced thermoresistive high-temperature sensor based on a 3C-silicon carbide-on-insulator (3C-SiCOI) platform is demonstrated, with the highest temperature sensing ability reported to date among SiC temperature sensors. This SiCOI temperature sensor exhibits linear current-voltage (I-V) characteristics, small hysteresis error, high sensitivity and reliability in a wide temperature range varying from room temperature to 750 °C. The natural logarithm of the measured resistance of the sensor is found to vary linearly with temperatures up to 750 °C. This high-performance SiCOI temperature sensor enabled by simple, cost-effective fabrication processes provides a feasible route toward high-temperature sensing in harsh environments.",

keywords = "High Temperature, Silicon Carbide-On-Insulator, Thermoresistive",

author = "Baoyun Sun and Jiarui Mo and {Van Driel}, {Willem D.} and Guoqi Zhang",

note = "Green Open Access added to TU Delft Institutional Repository {\textquoteleft}You share, we take care!{\textquoteright} – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. ; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",

year = "2023",

language = "English",

series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",

publisher = "IEEE",

pages = "197--200",

booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",

address = "United States",

}

Sun, B, Mo, J, Van Driel, WD & Zhang, G 2023, High-Performance Silicon Carbide-on-Insulator Thermoresistive High-Temperature Sensor up to 750 °C. in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, IEEE, pp. 197-200, 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, Kyoto, Japan, 25/06/23.

High-Performance Silicon Carbide-on-Insulator Thermoresistive High-Temperature Sensor up to 750 °C. / Sun, Baoyun; Mo, Jiarui; Van Driel, Willem D. et al.
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. IEEE, 2023. p. 197-200 (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - High-Performance Silicon Carbide-on-Insulator Thermoresistive High-Temperature Sensor up to 750 °C

AU - Sun, Baoyun

AU - Mo, Jiarui

AU - Van Driel, Willem D.

AU - Zhang, Guoqi

N1 - Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2023

Y1 - 2023

N2 - Accurate and reliable high-temperature measurement in hostile environments is crucial in various fields of science and engineering. Here, an advanced thermoresistive high-temperature sensor based on a 3C-silicon carbide-on-insulator (3C-SiCOI) platform is demonstrated, with the highest temperature sensing ability reported to date among SiC temperature sensors. This SiCOI temperature sensor exhibits linear current-voltage (I-V) characteristics, small hysteresis error, high sensitivity and reliability in a wide temperature range varying from room temperature to 750 °C. The natural logarithm of the measured resistance of the sensor is found to vary linearly with temperatures up to 750 °C. This high-performance SiCOI temperature sensor enabled by simple, cost-effective fabrication processes provides a feasible route toward high-temperature sensing in harsh environments.

AB - Accurate and reliable high-temperature measurement in hostile environments is crucial in various fields of science and engineering. Here, an advanced thermoresistive high-temperature sensor based on a 3C-silicon carbide-on-insulator (3C-SiCOI) platform is demonstrated, with the highest temperature sensing ability reported to date among SiC temperature sensors. This SiCOI temperature sensor exhibits linear current-voltage (I-V) characteristics, small hysteresis error, high sensitivity and reliability in a wide temperature range varying from room temperature to 750 °C. The natural logarithm of the measured resistance of the sensor is found to vary linearly with temperatures up to 750 °C. This high-performance SiCOI temperature sensor enabled by simple, cost-effective fabrication processes provides a feasible route toward high-temperature sensing in harsh environments.

KW - High Temperature

KW - Silicon Carbide-On-Insulator

KW - Thermoresistive

UR - http://www.scopus.com/inward/record.url?scp=85193527000&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85193527000

T3 - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

SP - 197

EP - 200

BT - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

PB - IEEE

T2 - 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Y2 - 25 June 2023 through 29 June 2023

ER -

Sun B, Mo J, Van Driel WD , Zhang G. High-Performance Silicon Carbide-on-Insulator Thermoresistive High-Temperature Sensor up to 750 °C. In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. IEEE. 2023. p. 197-200. (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

High-Performance Silicon Carbide-on-Insulator Thermoresistive High-Temperature Sensor up to 750 °C

Abstract

Publication series

Conference

Bibliographical note

Keywords

Access to Document

Other files and links

Fingerprint

Cite this