A repeatable method to fabricate multi-layer graphene (ML-gr) membranes of 2r = 85 - 155 μm (t < 10 nm) with a 100% yield on 100 mm wafers is demonstrated. These membranes show higher sensitivity than a commercial MEMS-Mic combined with an area reduction of 10x. The process overcomes one of the main limitations when integrating graphene diaphragms in microphones due to the absence of automatic transfer methods on non-planarized target substrates. This method aims to overcome this limitation by combining a full-dry release of Chemical Vapor Deposition (CVD) graphene by Deep Reactive Ion Etching (DRIE) and vapor HF (VHF).
|Title of host publication||Proceedings of the 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)|
|Place of Publication||Danvers|
|Number of pages||4|
|Publication status||Published - 2023|
|Event||2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) - Munich, Germany|
Duration: 15 Jan 2023 → 19 Jan 2023
Conference number: 36th
|Conference||2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)|
|Period||15/01/23 → 19/01/23|
Bibliographical noteGreen Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.