High Pressure Aluminium for Submicron Vias using a Liquid Transducer

JF Jongste, X Li, JP Lokker, GCAM Janssen, S Radelaar

    Research output: Contribution to journalArticlepeer-review

    Original languageUndefined/Unknown
    Pages (from-to)319-327
    Number of pages9
    JournalMicroelectronic Engineering
    Volume37/38
    Publication statusPublished - 1997

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