High Pressure Aluminium for Submicron Vias using a Liquid Transducer

JF Jongste, X Li, JP Lokker, GCAM Janssen, S Radelaar

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	319-327
Number of pages	9
Journal	Microelectronic Engineering
Volume	37/38
Publication status	Published - 1997

Cite this

@article{180d50a28e8e48848ca37549e2301399,

title = "High Pressure Aluminium for Submicron Vias using a Liquid Transducer",

author = "JF Jongste and X Li and JP Lokker and GCAM Janssen and S Radelaar",

year = "1997",

language = "Undefined/Unknown",

volume = "37/38",

pages = "319--327",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}