High Pressure Filling of Sub-micron Aluminium Vias

JF Jongste, JP Lokker, GCAM Janssen, AH Verbruggen, S Radelaar

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Materials Research Society
Editors	JKR Cheung, K Tsubouchi, M Murakami, N Kobayashi
Pages	217-224
Number of pages	8
Publication status	Published - 1998

Cite this

@inproceedings{43ba76842cd04272b6a5d52ba627db8a,

title = "High Pressure Filling of Sub-micron Aluminium Vias",

author = "JF Jongste and JP Lokker and GCAM Janssen and AH Verbruggen and S Radelaar",

year = "1998",

language = "Undefined/Unknown",

pages = "217--224",

editor = "JKR Cheung and K Tsubouchi and M Murakami and N Kobayashi",

booktitle = "Materials Research Society",

}